WECO Co., Ltd. proposes Ozone Technology that is professional and applicable to various fields.
High-concentration, high-purity Ozone Generator
WECO received a metal disk-shaped discharge tube manufacturing technology (Patent Registration No. 10-1109552), MGDT (Micro Gab Discharge Technology) from the Korea Institute of Machinery and Material, which produces high-concentration, high-purity ozone for semiconductor processing. Based on MGDT technology, we have developed our own ozone generator, and the ozone production concentration of the machine is 14% wt.
|Flow Rate||3 LPM|
|Ozone Output||14%wt (209.7 g/m³), at 18℃|
|Cooling Water Temperature||5 ~ 25℃ (3 LPM)|
|Nominal Cell Pressure||2bar (30psi)|
|Voltage Requirements||208 VAC(±10%)|
WECO's high-concentration high-purity ozone generator is an integrated modular system capable of generating large-capacity ozone and consists of up to 12 multi-channels. Its applications are Advanced Oxidation Process and Semiconductor Processing.
|Ozone Generator||12 channel|
|Power Supply||Max output 450W, 20kHz|
|Feed Gas||Oxygen 99.9%|
|Ozone Output||0 ~ 20%wt(305.9 g/m³) per channel at 18℃|
|Ozone Generation efficiency||184.4 g/kWh||Cooling Water Temperature||5 ~ 25℃ (channel 3 LPM )|
|Voltage Requirements||208 volts AC (±10%), three phase|