WECO Co., Ltd. proposes Ozone Technology that is professional and applicable to various fields.
High-concentration, high-purity Ozone Generator
WECO received a metal disk-shaped discharge tube manufacturing technology (Patent Registration No. 10-1109552), MGDT (Micro Gab Discharge Technology) from the Korea Institute of Machinery and Material, which produces high-concentration, high-purity ozone for semiconductor processing. Based on MGDT technology, we have developed our own ozone generator, and the ozone production concentration of the machine is 14% wt.
Feed Gas | Oxygen |
Flow Rate | 3 LPM |
Ozone Output | 14%wt (209.7 g/m³), at 18℃ |
Cooling Water Temperature | 5 ~ 25℃ (3 LPM) |
Nominal Cell Pressure | 2bar (30psi) |
Voltage Requirements | 208 VAC(±10%) |
Water Treatment
WECO's high-concentration high-purity ozone generator is an integrated modular system capable of generating large-capacity ozone and consists of up to 12 multi-channels. Its applications are Advanced Oxidation Process and Semiconductor Processing.
Ozone Generator | 12 channel |
Power Supply | Max output 450W, 20kHz |
Feed Gas | Oxygen 99.9% |
Ozone Output | 0 ~ 20%wt(305.9 g/m³) per channel at 18℃ |
Ozone Generation efficiency | 184.4 g/kWh | Cooling Water Temperature | 5 ~ 25℃ (channel 3 LPM ) |
Voltage Requirements | 208 volts AC (±10%), three phase |